Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Peter H. LaFond0
Date of Patent
May 18, 2010
0Patent Application Number
110686920
Date Filed
February 28, 2005
0Patent Primary Examiner
Patent abstract
A method for a geometry of a lateral comb drive for an in-plane, electrostatic force feedback, closed-loop, micromachined accelerometer or closed-loop Coriolis rate gyroscope device, or closed-loop capacitive pressure or force measuring device. When vibration is applied to the device, the error in the time-average output, which is vibration rectification error, due to this input vibration is minimized or eliminated. The geometry resulting from practice of the present invention is space-efficient because drive force is maximized while vibration rectification is minimized or eliminated.
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