Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tetsuya Hamada0
Date of Patent
May 25, 2010
0Patent Application Number
116212160
Date Filed
January 9, 2007
0Patent Primary Examiner
Patent abstract
A substrate processing apparatus comprises an interface block. An exposure device is arranged adjacent to the interface block. The interface block comprises first and second cleaning/drying processing units. A substrate W is subjected to cleaning and drying processing before exposure processing in the first cleaning/drying processing unit, while being subjected to cleaning and drying processing after the exposure processing in the second cleaning/drying processing unit.
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