Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 25, 2010
Patent Application Number
11392220
Date Filed
March 28, 2006
Patent Primary Examiner
Patent abstract
Some problems related to processing workpieces are presented along with solutions to one or more of the problems. One embodiment of the invention comprises a sensor apparatus for collecting data representing one or more process conditions used for processing a workpiece. Another embodiment of the present invention is a combination comprising a sensor apparatus and a process tool for applications such as chemical mechanical planarization of workpieces and chemical mechanical polishing of workpieces.
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