Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
James G. Maveety0
Sarah E. Kim0
R. Scott List0
Alan M. Myers0
Quat T. Vu0
Date of Patent
May 25, 2010
0Patent Application Number
106692050
Date Filed
September 24, 2003
0Patent Primary Examiner
Patent abstract
Trenches may be formed in the upper surfaces of a pair of wafers. Each trench may be coated with a catalyst that is capable of removing oxygen or hydrogen from a fluid used for cooling in a system making use of the electroosmotic effect for pumping. Channels may be formed to communicate fluid to and from the trench coated with the catalyst. The substrates may be combined in face-to-face abutment, for example using copper-to-copper bonding to form a re-combiner.
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