US Patent 7723808 Semiconductor device and method of manufacturing semiconductor device

The present invention provides a semiconductor device and a method of manufacturing a semiconductor device in which a driving force can be increased by increasing a strain amount given by a stressed film in a MOS transistor including an elevated region. On a silicon substrate, a device isolation region 102, a gate insulating film 103, a gate electrode 104, an extension 105, and a sidewall insulating film 106 are formed. After that, an elevated region is formed, and a source/drain region 108 and a silicide layer 109 are formed. Subsequently, the sidewall insulating film 106 is etched to provide a gap from the elevated region 107, and a stressed film 110 is buried in the gap.