Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yun-kwon Park0
Jong-seok Kim0
Sang-wook Kwon0
Sung-hoon Choa0
Duck-hwan Kim0
In-sang Song0
Date of Patent
May 25, 2010
Patent Application Number
11342564
Date Filed
January 31, 2006
Patent Primary Examiner
Patent abstract
A RF system which includes a silicon substrate formed with at least one via-hole filled with conductive material so that both sides of the silicon substrate are electrically connected with one another; at least one flat device formed on one side of the silicon substrate; and at least one RF MEMS device formed on the other side of the silicon substrate.
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