Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
John D. Baniecki0
Takeshi Shioga0
Kazuaki Kurihara0
Date of Patent
June 1, 2010
0Patent Application Number
118526080
Date Filed
September 10, 2007
0Patent Primary Examiner
Patent abstract
A strain sensor comprises a capacitor formed on a substrate, the capacitor having a layered structure in which a lower electrode, a metal oxide film of perovskite structure and an upper electrode are laminated consecutively on the substrate, the capacitor being adapted to be mounted upon a specimen, and a measuring circuit that measures a leakage current flowing through the capacitor between the upper electrode and the lower electrode.
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