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US Patent 7727055 Flexible membrane for carrier head

Patent 7727055 was granted and assigned to Applied Materials on June, 2010 by the United States Patent and Trademark Office.

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Patent abstract

A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. The flexible membrane has a main portion and an outer annular portion, wherein a junction between the main portion and the outer annular portion comprises a peripheral edge hinge and an annular recess above the hinge along the outer wall of the outer annular portion.

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