Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shigeru Kido0
Date of Patent
June 1, 2010
0Patent Application Number
116938590
Date Filed
March 30, 2007
0Patent Primary Examiner
Patent abstract
A suction pad used for use in a substrate treatment apparatus which treats a substrate by immersing the substrate in a solution while the pad attaches to the substrate, including: a main face for attaching to the substrate; an outer face disposed along the outer periphery of the substrate; and a suction opening formed in the main face. In a cross-sectional shape including the main face and the outer face, the angle formed between a line corresponding to the main face and a line corresponding to the outer face is an acute angle.
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