US Patent 7727366 Balancing pressure to improve a fluid seal
Patent 7727366 was granted and assigned to Nexx Systems on June, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 2, 2005
Date of Patent
June 1, 2010
Patent Application Number
11265543
Patent Inventor Names
Zhenqiu Liu
0
Arthur Keigler
0
John Harrell
0
Qunwei Wu
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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