US Patent 7728308 Apparatus for blanking a charged particle beam
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Patent abstract
A beam blanking unit (1) comprises first and second blanking plates (2, 3) mounted to a support plate (15). A stopper (4) is mechanically and electrically connected to the first blanking plate (2).
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US Patent 07728308 Apparatus for blanking a charged particle beam US Patent 7728308 Apparatus for blanking a charged particle beam
Infobox
Patent Number
0772830800
Patent Number
772830800
Edits on 22 Mar, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
077283080
Date of Patent
June 1, 2010
0Patent Application Number
116281960
Date Filed
May 13, 2005
0Official Website
Patent Primary Examiner
Edits on 23 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
077283080
Date of Patent
June 1, 2010
0Patent Application Number
116281960
Date Filed
May 13, 2005
0Official Website
Patent Primary Examiner
Edits on 18 Jun, 2022
Golden AI
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US Patent 07728308 Apparatus for blanking a charged particle beam
Infobox
Is a
Patent jurisdiction
Patent number
07728308
Date of patent
June 1, 2010
Patent application number
11628196
Date Filed
May 13, 2005
Patent primary examiner
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