Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hiroyuki Wado0
Makiko Sugiura0
Date of Patent
June 8, 2010
0Patent Application Number
117902980
Date Filed
April 24, 2007
0Patent Primary Examiner
Patent abstract
An ultrasonic sensor is provided with a substrate unit where a thin-walled portion is arranged and a piezoelectric oscillator which is formed at the substrate unit. The piezoelectric oscillator includes two electrodes and a piezoelectric film positioned between the two electrodes. The thin-walled portion and the piezoelectric oscillator construct a membrane structure which will resonate at a predetermined frequency.
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