US Patent 7732056 Corrosion-resistant aluminum component having multi-layer coating
Patent 7732056 was granted and assigned to Applied Materials on June, 2010 by the United States Patent and Trademark Office.
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Patent abstract
A method of providing a corrosion-resistant coating on a surface of an aluminum component comprises anodizing the surface of the aluminum component to form an anodized aluminum oxide layer and sputter coating a sputtered layer on the anodized aluminum oxide layer. A coated aluminum component can be used in a substrate processing chamber and comprises an aluminum body, an anodized aluminum oxide layer formed on the aluminum body, and a sputtered layer comprising aluminum oxide on the anodized aluminum oxide layer.
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US Patent 07732056 Corrosion-resistant aluminum component having multi-layer coating US Patent 7732056 Corrosion-resistant aluminum component having multi-layer coating
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Patent Number
0773205600
Patent Number
773205600
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Official Website
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
077320560
Date of Patent
June 8, 2010
0Patent Application Number
110376330
Date Filed
January 18, 2005
0Official Website
Patent Primary Examiner
Edits on 27 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
077320560
Date of Patent
June 8, 2010
0Patent Application Number
110376330
Date Filed
January 18, 2005
0Official Website
Patent Primary Examiner
Edits on 3 Jun, 2022
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Website URL
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US Patent 07732056 Corrosion-resistant aluminum component having multi-layer coating
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07732056
Date of patent
June 8, 2010
Patent application number
11037633
Date Filed
January 18, 2005
Patent primary examiner
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