Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
June 15, 2010
Patent Application Number
12076834
Date Filed
March 24, 2008
Patent Primary Examiner
Patent abstract
A substrate processing unit includes: a vertically-movable substrate holder for holding a substrate; a pan surrounding a periphery of the substrate holder; a cell, located below the substrate holder and within the pan, having in its interior a chemical processing section; and a cell cover, capable of closing a top opening of the cell, having a plurality of spray nozzles for separately spraying at least two types of processing liquids, wherein the pan and the cell each have an individual liquid discharge line.
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