Patent 7736210 was granted and assigned to Wisconsin Alumni Research Foundation on June, 2010 by the United States Patent and Trademark Office.
A microscale vacuum electronic device (10) provides for a mechanical modulation of cathode (12) position with respect to the anode position, the anode electrically biased with respect to the cathode and held in an evacuated housing with the cathode, allowing improved high-frequency modulation of an electron beam (24) useful for vacuum electronic devices such as klystrons, klystrodes, and high frequency triodes.