Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
June 15, 2010
Patent Application Number
11645808
Date Filed
December 27, 2006
Patent Primary Examiner
Patent abstract
A debris mitigation system for trapping debris coming from a tin debris-generating radiation source is provided. The debris mitigating system includes a debris barrier comprising a plurality of foils, and a cleaning system constructed and arranged to clean the foils. The cleaning system includes a supply unit to provide a liquid alloy to the foils to dissolve and flush trapped debris from the foils. The alloy includes gallium, indium, tin, or any combination thereof.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
