Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takeshi Saito0
Motohisa Noguchi0
Motoki Takabe0
Naoto Yokoyama0
Koji Sumi0
Date of Patent
June 22, 2010
0Patent Application Number
117306440
Date Filed
April 3, 2007
0Patent Primary Examiner
Patent abstract
Disclosed is an actuator device which includes a vibration plate and a piezoelectric element. The vibration plate includes an elastic film which is made of silicon oxide (SiO2) and which is formed on a substrate while the piezoelectric element is formed on the vibration plate and including a lower electrode, a piezoelectric layer and an upper electrode. The vibration plate has such a stress as to give a tensile stress between 300 MPa and 500 MPa, inclusive, to the piezoelectric element that is in a state of being displaced.
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