US Patent 7741131 Laser processing of light reflective multilayer target structure
Patent 7741131 was granted and assigned to Electro Scientific Industries on June, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
May 25, 2007
Date of Patent
June 22, 2010
Patent Application Number
11754214
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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