Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hiroshi Sakuma0
Kenichi Koyanagi0
Date of Patent
June 22, 2010
0Patent Application Number
117461850
Date Filed
May 9, 2007
0Patent Primary Examiner
Patent abstract
A method for forming a capacitor insulation film includes the step of depositing a monoatomic film made of a metal by supplying a metal source including the metal and no oxygen, and depositing a metal oxide film including the metal by using a CVD technique. The method provides the metal oxide film having higher film properties with a higher throughput.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
