Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shahin Zangooie0
Lin Zhou0
Roger M. Young0
Ronald D. Fiege0
Clemente Bottini0
Date of Patent
June 22, 2010
Patent Application Number
12014408
Date Filed
January 15, 2008
Patent Primary Examiner
Patent abstract
A method, system and computer program product for determining an angle of incidence of a light beam illuminating a workpiece positioned on a stage are disclosed. A method for determining an angle of incidence of a light beam illuminating a workpiece positioned on a stage may include: positioning a calibration target on the stage with multiple different tilts; first determining an angle of incident of the light beam with respect to the calibration target with each tilt using a detector; mapping a response of the detector to a determined angle of incidence; and second determining the angle of incidence with respect to the workpiece based on a result of the mapping.
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