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US Patent 7743728 Cluster tool architecture for processing a substrate

Patent 7743728 was granted and assigned to Applied Materials on June, 2010 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Current Assignee
Applied Materials
Applied Materials
Date Filed
April 21, 2008
Date of Patent
June 29, 2010
Patent Application Number
12106824
Patent Citations Received
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US Patent 12137601 In-line monitoring of OLED layer thickness and dopant concentration
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US Patent 11856833 In-line monitoring of OLED layer thickness and dopant concentration
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US Patent 11889740 In-line monitoring of OLED layer thickness and dopant concentration
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Patent Inventor Names
Brian Lue
0
Charles Carlson
0
Chongyang Wang
0
David H. Quach
0
Harald Herchen
0
Helen R. Armer
0
Jay D. Pinson
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Jeffrey Hudgens
0
John A. Backer
0
Leon Volfovski
0
•••
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7743728
Patent Primary Examiner
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Yewebdar T Tadesse

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