Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yi Cao0
Muthiah Thiyagarajan0
Ralph R. Dammel0
Sung Eun Hong0
Date of Patent
June 29, 2010
0Patent Application Number
121413070
Date Filed
June 18, 2008
0Patent Primary Examiner
Patent abstract
The present invention relates to an aqueous coating composition for coating a photoresist pattern, comprising a polymer comprising at least one unit with an alkylamino group, where the unit has a structure (1),
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