Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Sriram Krishnaswami0
Matthias Brunner0
Ralf Schmid0
Shinichi Kurita0
Benjamin M. Johnston0
Fayez E. Abboud0
Hung T. Nguyen0
James C. Hunter0
...
Date of Patent
June 29, 2010
Patent Application Number
12422164
Date Filed
April 10, 2009
Patent Primary Examiner
Patent abstract
A method and apparatus for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the apparatus performs a test on the substrate in one linear axis in at least one chamber that is slightly wider than a dimension of the substrate to be tested. Clean room space and process time is minimized due to the smaller dimensions and volume of the system.
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