US Patent 7746089 Method and apparatus for indirect planarization
Patent 7746089 was granted and assigned to FormFactor on June, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 29, 2006
Date of Patent
June 29, 2010
Patent Application Number
11537164
Patent Inventor Names
Eric D. Hobbs
0
Alexander H. Slocum
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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