Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Akiharu Miyanaga0
Hisashi Ohtani0
Hongyong Zhang0
Naoaki Yamaguchi0
Date of Patent
July 6, 2010
Patent Application Number
11808035
Date Filed
June 6, 2007
Patent Primary Examiner
Patent abstract
It is an object to obtain a crystalline silicon film having preferable characteristics for a thin film transistor.
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