Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Aditya Agarwal0
Thomas Parrill0
Date of Patent
July 6, 2010
0Patent Application Number
124182370
Date Filed
April 3, 2009
0Patent Primary Examiner
Patent abstract
Ion implanters are especially suited to meet process dose and energy demands associated with fabricating photovoltaic devices by ion implantation followed by cleaving.
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