Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jin Wuk Kim0
Date of Patent
July 13, 2010
Patent Application Number
11320210
Date Filed
December 27, 2005
Patent Primary Examiner
Patent abstract
A method and apparatus for fabricating a flat panel display device is disclosed. A thin film is patterned in a patterning process using a soft mold without using a photo process. A thin film layer and a resist are sequentially formed on a substrate. A designated resist pattern is formed by applying pressure to the resist using a soft mold. The resist has a dipole moment μ value equal to or higher than 2(D), or has a solubility parameter value lower than 6 (cal/cm3)1/2 or higher than 11 (cal/cm3)1/2.
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