Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jeffrey R. Pollard0
Date of Patent
July 13, 2010
0Patent Application Number
104373780
Date Filed
May 13, 2003
0Patent Primary Examiner
Patent abstract
The described embodiments relate to laser micromachining a substrate. One exemplary embodiment removes substrate material from a substrate to a first depth relative to a first surface of the substrate while delivering an assist gas at a first flow rate; and, removes substrate material at a second greater depth while delivering the assist gas at a second higher flow rate.
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