Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 13, 2010
Patent Application Number
11967116
Date Filed
December 29, 2007
Patent Primary Examiner
Patent abstract
An ionization vacuum gauge includes a cathode electrode, a gate electrode, and an ion collector. The gate electrode is disposed adjacent to the cathode electrode with a distance therebetween. The ion collector is disposed adjacent to the gate electrode also with a distance therebetween. The cathode electrode includes a base and a field emission film disposed thereon facing the ion collector.
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