Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
July 13, 2010
Patent Application Number
12095089
Date Filed
November 8, 2006
Patent Primary Examiner
Patent abstract
Provided is a micro-electromechanical device capable of processing an electric signal in the high frequency region by a simple device structure. The micro-electromechanical device is formed, including an oscillator element having a plurality of electrodes disposed on a substrate and a beam facing the electrodes to oscillate by electrostatic drive. An input/output of a high frequency signal is applied to one of the combinations of the electrodes and the beam.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
