US Patent 7758708 Nanocomposite films
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Patent abstract
A thin-film composition of nanocrystal molybdenum in an amorphous metallic matrix may be formed by co-sputtering Mo with aluminum or nickel. NEMS cantilevers may be formed from the film. The films exhibit high nanoindentation hardness and a reduction in roughness and intrinsic stress, while maintaining resistivity in the metallic range.
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Patent Inventor Names
Colin Ophus0
David Mitlin0
Ken Westra0
Nathaniel Nelson-Fitzpatrick0
Reza Mohammadi0
Stephane Evoy0
Velimir Radmilovic0
Zonghoon Lee0
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US Patent 07758708 Nanocomposite films US Patent 7758708 Nanocomposite films
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Patent Number
077587080
Patent Number
77587080
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Official Website
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Infobox
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Patent Jurisdiction
Patent Number
077587080
Date of Patent
July 20, 2010
0Patent Application Number
118314340
Date Filed
July 31, 2007
0Official Website
Patent Primary Examiner
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US Patent 07758708 Nanocomposite films
Infobox
Is a
Patent jurisdiction
Patent number
07758708
Date of patent
July 20, 2010
Patent application number
11831434
Date Filed
July 31, 2007
Patent primary examiner
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