Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 20, 2010
Patent Application Number
11566557
Date Filed
December 4, 2006
Patent Citations Received
Patent Primary Examiner
Patent abstract
A sensor for detecting mechanical perturbations represented by a change in an electrical signal includes a structure such as a cantilever, membrane, etc. and a field effect transistor such as a MOSFET embedded in the structure. The drain current of the embedded transistor changes with mechanical perturbations in the structure caused, for example, by a biochemical interaction being sensed. A scanning probe microscope utilizes the embedded MOSFET with a BiMOS actuator.
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