Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Gideon J. van Zyl0
Date of Patent
July 20, 2010
0Patent Application Number
118734030
Date Filed
October 16, 2007
0Patent Citations Received
0
...
Patent Primary Examiner
Patent abstract
A method and apparatus for detecting arcs in a plasma processing system is disclosed. In one embodiment the apparatus comprises an input to receive a measured value of a parameter related to power transfer from the RF power generator to a plasma load; arc detection circuitry that computes a dynamic boundary about the value of the parameter; and controller logic responsive to the arc detection circuitry, wherein the controller logic indicates an occurrence of an arc within the plasma load if a subsequent value of the parameter exceeds the dynamic boundary.
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