US Patent 7763831 Heating device
Patent 7763831 was granted and assigned to NGK Insulators on July, 2010 by the United States Patent and Trademark Office.
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Patent abstract
A heating device has a ceramic base with a heating surface, and a heating body embedded in the ceramic base. The heating device includes a thermal conductive member positioned between the heating surface and the heating body in the ceramic base. The thermal conductive member has a thermal conductivity that is higher than the ceramic base and as such, the heating device achieves superior temperature uniformity of a heated object particularly in a semiconductor device manufacturing process.
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US Patent 07763831 Heating device US Patent 7763831 Heating device
Infobox
Patent Number
0776383100
Patent Number
776383100
Edits on 25 Apr, 2023
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
077638310
Date of Patent
July 27, 2010
0Patent Application Number
119397600
Date Filed
November 14, 2007
0Official Website
Patent Primary Examiner
Edits on 25 Sep, 2022
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
077638310
Date of Patent
July 27, 2010
0Patent Application Number
119397600
Date Filed
November 14, 2007
0Official Website
Patent Primary Examiner
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US Patent 07763831 Heating device
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07763831
Date of patent
July 27, 2010
Patent application number
11939760
Date Filed
November 14, 2007
Patent primary examiner
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