Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Peter Choi0
Date of Patent
August 3, 2010
0Patent Application Number
104970520
Date Filed
November 28, 2002
0Patent Primary Examiner
Patent abstract
The invention concerns a method for coating a support (10) comprising a first material with a coating layer comprising a second material, including at least a phase (A, A′) for deposition of a layer of given thickness of coherent material (11, 13) on the support surface during which the interaction between an ion source and a plasma is used. The invention is characterized in that each phase (A, A′) of material deposition is followed by a phase (B, B′) for exposure of the support and the deposited layer of material (11, 13) to a pulse of limited duration of an ionic bombardment with high energy density of selected energy density level.
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