US Patent 7767378 Method for producing resist composition and resist composition
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Patent abstract
A method for producing a resist composition including a resin component (A) that exhibits changed alkali solubility under the action of acid and an acid generator component (B) that generates acid upon exposure, the method including the steps of: obtaining the component (A) by mixing a plurality of copolymers, which are composed of the same structural units but have mutually different measured values for the contact angle.
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Patent Inventor Names
Hiroaki Shimizu0
Masaru Takeshita0
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US Patent 07767378 Method for producing resist composition and resist composition US Patent 7767378 Method for producing resist composition and resist composition
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Patent Number
07767378
Patent Number
7767378
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US Patent 07767378 Method for producing resist composition and resist composition
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Is a
Patent jurisdiction
Patent number
07767378
Date of patent
August 3, 2010
Patent application number
11718388
Date Filed
November 4, 2005
Patent primary examiner
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