Patent 7768013 was granted and assigned to Electronics and Telecommunications Research Institute on August, 2010 by the United States Patent and Trademark Office.
A vertical structure thin film transistor is provided. The vertical structure thin film transistor has a stacked structure of a substrate, a first electrode, a dielectric thin film, a second electrode, a semiconductor thin film, and a third electrode, wherein current flows between the second and third electrodes perpendicularly to the substrate and is modulated by an electric field generated from the first electrode parallel to the current.