US Patent 7768659 Determining copper concentration in spectra

Patent 7768659 was granted and assigned to Applied Materials on August, 2010 by the United States Patent and Trademark Office.

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Date of Patent

August 3, 2010

Patent Application Number

11868911

Date Filed

October 8, 2007

Patent Primary Examiner

Patent abstract

Methods of subtracting the copper contribution to spectra obtained from a substrate during chemical mechanical polishing are described.

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