US Patent 7776394 Atomic layer deposition of metal-containing films using surface-activating agents

Patent 7776394 was granted and assigned to E.I. Du Pont De Nemours And Company on August, 2010 by the United States Patent and Trademark Office.

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Patent Inventor Names

Jeffery Scott Thompson0

Date of Patent

August 17, 2010

Patent Application Number

114978590

Date Filed

August 1, 2006

Patent Primary Examiner

Patent abstract

Atomic layer deposition processes for the formation of metal-containing films on surfaces are provided.

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