Patent attributes
A method for manufacturing a semiconductor device including coating a photo-resist layer on a semiconductor substrate having a lower layer; performing a soft-bake process on the photo-resist layer; performing an exposure process on the photo-resist layer having passed through the soft-bake process; performing a post exposure-bake (PEB) process on photo-resist pattern holes formed by the exposure process; performing a developing process on the photo-resist pattern holes having passed through the PEB process; and performing a hard-bake process on the photo-resist pattern holes having passed through the developing process. The method improves the circularity of PR pattern holes to improve the profile of contacts in an etching process after a photography process, resulting in an enhancement in the operation reliability of the device.
