Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Mayumi Yamaguchi0
Konami Izumi0
Date of Patent
August 17, 2010
0Patent Application Number
126358130
Date Filed
December 11, 2009
0Patent Primary Examiner
Patent abstract
It has been difficult to manufacture a semiconductor device equipped with a microstructure having a space, an electric circuit for controlling the microstructure, and the like over one substrate. In a semiconductor device, a microstructure and an electric circuit for controlling the microstructure can be provided over one substrate by manufacturing the microstructure in such a way that a structural layer having polycrystalline silicon obtained by laser* crystallization or thermal crystallization using a metal element is formed and processed at low temperature. As the electric circuit, a wireless communication circuit for carrying out wireless communication with an antenna is given.
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