US Patent 7778302 Laser system
Patent 7778302 was granted and assigned to Cymer on August, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 30, 2007
0
Date of Patent
August 17, 2010
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Patent Application Number
11981290
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Patent Inventor Names
William N. Partlo
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Alexander I. Ershov
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Daniel J. W. Brown
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Igor V. Fomenkov
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Robert A. Bergstedt
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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