Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ya-Hong Xie0
Date of Patent
August 24, 2010
0Patent Application Number
114687110
Date Filed
August 30, 2006
0Patent Primary Examiner
Patent abstract
A device for forming a self-assembled film on a substrate containing a film precursor includes a first heating member and a second heating member disposed adjacent to the first heating member, the second heating member being separated from the first heating member by a gap. The device includes a movable pusher member configured for advancing the substrate from the first heating member to the second heating member.
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