US Patent 7781149 Reduced pitch multiple exposure process
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Patent abstract
A lithographic method to enhance image resolution in a lithographic cluster using multiple projections and a lithographic cluster used to project multiple patterns to form images that are combined to form an image having enhanced resolution.
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US Patent 07781149 Reduced pitch multiple exposure process US Patent 7781149 Reduced pitch multiple exposure process
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Patent Number
0778114900
Patent Number
778114900
Edits on 7 Apr, 2023
Golden AI
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Is a
Patent Jurisdiction
Patent Number
077811490
Date of Patent
August 24, 2010
0Patent Application Number
113870470
Date Filed
March 23, 2006
0Official Website
Patent Primary Examiner
Edits on 23 Sep, 2022
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Infobox
Is a
Patent Jurisdiction
Patent Number
077811490
Date of Patent
August 24, 2010
0Patent Application Number
113870470
Date Filed
March 23, 2006
0Official Website
Patent Primary Examiner
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US Patent 07781149 Reduced pitch multiple exposure process
Infobox
Is a
Patent jurisdiction
Patent number
07781149
Date of patent
August 24, 2010
Patent application number
11387047
Date Filed
March 23, 2006
Patent primary examiner
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