Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Michiel Kupers0
Boris Habets0
Date of Patent
August 24, 2010
0Patent Application Number
120561340
Date Filed
March 26, 2008
0Patent Primary Examiner
Patent abstract
Methods and systems of alternative overlay calculation and of calculating overlay stability based on alternative overlay settings in a fabrication unit, and a computer readable medium are disclosed being capable of calculating alternative overlay error values based on alignment model parameters, alternative alignment model parameters, and overlay error values for a plurality of measurement positions.
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