Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Pierre Tomasini0
Carlos Mazure0
Chantal Arena0
Nyles W. Cody0
Date of Patent
August 31, 2010
Patent Application Number
11431336
Date Filed
May 9, 2006
Patent Primary Examiner
Patent abstract
Pile ups of threading dislocations in thick graded buffer layer are reduced by enhancing dislocation gliding. During formation of a graded SiGe buffer layer, deposition of SiGe from a silicon precursor and a germanium precursor is interrupted one or more times with periods in which the flow of the silicon precursor to the substrate is stopped while the flow of the germanium precursor to the substrate is maintained.
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