Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Richard Syms0
Richard William Moseley0
Date of Patent
August 31, 2010
0Patent Application Number
118100520
Date Filed
June 4, 2007
0Patent Primary Examiner
Patent abstract
The invention provides a planar component for interfacing an atmospheric pressure ionizer to a vacuum system. The component combines electrostatic optics and skimmers with an internal chamber that can be filled with a gas at a prescribed pressure and is fabricated by lithography, etching and bonding of silicon.
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