Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tamotsu Akashi0
Hirofumi Aota0
Date of Patent
August 31, 2010
Patent Application Number
11044179
Date Filed
January 28, 2005
Patent Primary Examiner
Patent abstract
The MEMS mirror, which has a reflective surface whose angle is variably changed, is provided with a portion whose reflectance is lowered than that of a center portion. The portion is provided in at least part of ends on a predetermined side of the MEMS mirror. As a result, a diffraction influence of light reflected by the end surfaces can be reduced at the time of angle change of the MEMS mirror.
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