Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 7, 2010
Patent Application Number
11857639
Date Filed
September 19, 2007
Patent Primary Examiner
Patent abstract
A method of cleaning a UV irradiation chamber includes steps of: (i) after completion of irradiating a substrate with UV light transmitted through an optical transmitted window provided in the UV irradiation chamber, generating radical species of a cleaning gas outside the UV irradiation chamber; and (ii) introducing the radical species from the outside of the UV irradiation chamber into the UV irradiation chamber, thereby cleaning the optical transmitted window.
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