Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Maurits Van Der Schaar0
Antoine Gaston Marie Kiers0
Arie Jeffrey Den Boef0
Mircea Dusa0
Date of Patent
September 7, 2010
0Patent Application Number
109187420
Date Filed
August 16, 2004
0Patent Citations Received
Patent Primary Examiner
Patent abstract
An apparatus and method to determine a property of a substrate by measuring, in the pupil plane of a high numerical aperture lens, an angle-resolved spectrum as a result of radiation being reflected off the substrate. The property may be angle and wavelength dependent and may include the intensity of TM- and TE-polarized light and their relative phase difference.
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